Electron Microscopy Facility - SEM Overview
The MERLIN Compact VP
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Resolution: 0.8nm @ 15KV; 1.4nm @ 1 KV; 0.8nm @ 30KV (STEM mode)
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Probe current: 5 pA to 100nA
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Acceleration voltage: 0.02 V to 30 kV
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Magnification: 12 – 2,00,000 X
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Electron Emitter:Thermal (Schottky) field emission gun.
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Detection Modes
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In-lens Duo: Switchable between on-axis in-lens secondary electron detection for highest surface sensitivity and energy selective backscattered detection for advanced materials contrasts.
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Secondary Ion: High efficiency in-lens SE detector Everhart Thornley Secondary Electron detector
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Variable Pressure: High efficiency VPSE detector for pressure up to 60 Pa
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STEM: Low voltage optimized bright field, 4 quadrant dark field, and high angular dark field transmission imaging.
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EDAX for chemical composition analysis and element mapping.
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Cryo SEM and freeze fracture for imaging hydrated samples or for beam/vacuum sensitive specimens.
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Correlative Microscopy with Shuttle and Find.
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Specimen Stage: 5-Axes Motorized Eucentric Specimen Stage:X = 130mm; Y = 130mm; Z = 50mm; T = - 3º to 70º; R = 360º (continous)
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Chamber: 330mm(Ø) x 270mm(h) 15 accessory ports for various options including CCD-Camera with IR-illumination
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Vacuum system: High vacuum mode and variable pressure mode